The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography

被引：11

作者：

Wu, Jun ^{[1
]}

Geng, Zhaoxin ^{[2
]}

Xie, Yiyang ^{[1
]}

Fan, Zhiyuan ^{[3
]}

Su, Yue ^{[3
]}

Xu, Chen ^{[1
]}

Chen, Hongda ^{[3
]}

机构：

[1] Beijing Univ Technol, Minist Educ, Key Lab Optoelect Technol, Beijing 100124, Peoples R China

[2] Minzu Univ China, Sch Informat Engn, Beijing 10083, Peoples R China

[3] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

来源：

NANOMATERIALS | 2019年 / 9卷 / 01期

基金：

国家重点研发计划; 北京市自然科学基金; 中国国家自然科学基金;

关键词：

laser interference lithograph; PDMS; periodic nanostructures;

D O I：

10.3390/nano9010073

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report a method for fabricating periodic nanostructures on the surface of polydimethylsiloxane (PDMS) using laser interference lithography. The wave-front splitting method was used for the system, as the period and duty cycle can be easily controlled. Indium tin oxide (ITO) glass reveals favorable characteristics for controlling the standing waves distributed in the vertical direction, and was selected as the rigid substrate for the curing of the PDMS prepolymer, photoresist spin coating, and exposure processes. Periodic nanostructures such as gratings, dot, and hole arrays were prepared. This efficient way of fabricating large area periodic nanoscale patterns will be useful for surface plasmonic resonance and wearable electronics.

引用

页数：8

共 50 条

[1] Fabrication of nanostructures with laser interference lithography
Xie, Q.
Hong, M. H.
Tan, H. L.
Chen, G. X.
Shi, L. P.
Chong, T. C.
JOURNAL OF ALLOYS AND COMPOUNDS, 2008, 449 (1-2) : 261 - 264
[2] Simulation and fabrication of nanostructures with laser interference lithography
Yang, H. F.
He, H. D.
Zhao, E. L.
Han, J.
Hao, J. B.
Qian, J. G.
Tang, W.
Zhu, H.
LASER PHYSICS, 2014, 24 (06)
[3] Fabrication of quasiperiodic nanostructures with EUV interference lithography
Langner, A.
Paeivaenranta, B.
Terhalle, B.
Ekinci, Y.
NANOTECHNOLOGY, 2012, 23 (10)
[4] Fabrication of magnetic nanostructures by direct laser interference lithography on supersaturated metal mixtures
Tselev, AE
Polushkin, NI
Verevkin, YK
Gorbunov, AA
Petryakov, VN
Pompe, W
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1): : S819 - S822
[5] Fabrication of magnetic nanostructures by direct laser interference lithography on supersaturated metal mixtures
A.E. Tselev
N.I. Polushkin
Y.K. Verevkin
A.A. Gorbunov
V.N. Petryakov
W. Pompe
Applied Physics A, 1999, 69 : S819 - S822
[6] Fabrication of hierarchical photonic nanostructures inspired by Morpho butterflies utilizing laser interference lithography
Siddique, Radwanul Hasan
Huenig, Ruben
Faisal, Abrar
Lemmer, Uli
Hoelscher, Hendrik
OPTICAL MATERIALS EXPRESS, 2015, 5 (05): : 996 - 1005
[7] Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
C. H. Liu
M. H. Hong
M. C. Lum
H. Flotow
F. Ghadessy
J. B. Zhang
Applied Physics A, 2010, 101 : 237 - 241
[8] Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
Liu, C. H.
Hong, M. H.
Lum, M. C.
Flotow, H.
Ghadessy, F.
Zhang, J. B.
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2010, 101 (02): : 237 - 241
[9] Fabrication of Three-Dimensional Si-Au Hierarchical Nanostructures by Laser Interference Lithography
Dong, Litong
Wang, Lu
Liu, Mengnan
Yu, Miao
Wang, Zuobin
Wang, Zuobin
Zhang, Ziang
Li, Dayou
Zhang, Ziang
2018 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) - CONFERENCE PROCEEDINGS, 2018, : 197 - 200
[10] The Fabrication of Laser Array by Holographic Interference Lithography
Chao, Chuli
Ni, Chi-Yu
Xuan, Rong
Kuo, Hao-Chung
2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 1928 - +

← 1 2 3 4 5 →