Plasma-assisted growth and nitrogen doping of graphene films

被引:42
|
作者
Wang, C. D.
Yuen, M. F.
Ng, T. W.
Jha, S. K.
Lu, Z. Z.
Kwok, S. Y.
Wong, T. L.
Yang, X.
Lee, C. S.
Lee, S. T.
Zhang, W. J. [1 ]
机构
[1] City Univ Hong Kong, Ctr Super Diamond & Adv Films COSDAF, Hong Kong, Hong Kong, Peoples R China
基金
中国国家自然科学基金;
关键词
CHEMICAL-VAPOR-DEPOSITION; DOPED GRAPHENE; EPITAXIAL GRAPHENE; CARBON-SOURCES; LARGE-AREA;
D O I
10.1063/1.4729823
中图分类号
O59 [应用物理学];
学科分类号
摘要
Microwave plasmas were employed to synthesize single- or double-layer graphene sheets on copper foils using a solid carbon source, polymethylmetacrylate. The utilization of reactive plasmas enables the graphene growth at reduced temperatures as compared to conventional thermal chemical vapor deposition processes. The effects of substrate temperature on graphene quality were studied based on Raman analysis, and a reduction of defects at elevated temperature was observed. Moreover, a facile approach to incorporate nitrogen into graphene by plasma treatment in a nitrogen/hydrogen gas mixture was demonstrated, and most of the nitrogen atoms were verified to be pyridinelike in carbon network. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4729823]
引用
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页数:5
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