A MEMS based Fabry-Perot accelerometer with high resolution

被引：32
|
作者：
Zhao, Minghui [1 ]
Jiang, Kangli [1 ]
Bai, Hongwu [2 ]
Wang, Hairong [1 ]
Wei, Xueyong [1 ,3 ]
机构：
[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
[2] Xian Inst Space Radio Technol, 504 West Weiqu St, Xian 710100, Peoples R China
[3] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Changchun 130033, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2020年 / 26卷 / 06期
基金：
中国国家自然科学基金; 国家重点研发计划;
关键词：
DESIGN;
D O I：
10.1007/s00542-020-04747-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry-Perot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter and photo translating system integrated by 3D printed sensor package is investigated. The sensitivity and resolution calibrated by intensity demodulation method are respectively, 183.793 V/g and 300 ng. The results show that the adopted G-shaped cantilever-mass structure sensing chip combined with the Fabry-Perot interfere technology can obtain good performance, and the 3D printed sensor package makes the interference optical path and accelerometer more robust and portable.
引用
收藏
页码：1961 / 1969
页数：9
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