New insights in photo-patterned sol-gel-derived TiO2 films

被引：38
|
作者：
Briche, S. [1 ]
Tebby, Z. [2 ]
Riassetto, D. [1 ]
Messaoud, M. [1 ]
Gamet, E. [3 ]
Pernot, E. [1 ]
Roussel, H. [1 ]
Dellea, O. [2 ]
Jourlin, Y. [3 ]
Langlet, M. [1 ]
机构：
[1] LMGP, Grenoble Inst Technol Minatec, F-38016 Grenoble, France
[2] PF D2 M CEA LITEN, F-42000 St Etienne, France
[3] Univ St Etienne, LabHC, F-42000 St Etienne, France
来源：
JOURNAL OF MATERIALS SCIENCE | 2011年 / 46卷 / 05期
关键词：
THIN POLYMER-FILMS; PHOTOCATALYTIC ACTIVITY; METAL NANOPARTICLES; PEN NANOLITHOGRAPHY; OXIDE-FILMS; MICROSTRUCTURES; TEXTILES; SURFACE; WATER; WETTABILITY;
D O I：
10.1007/s10853-010-4949-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Specific sol-gel formulations and protocols have been adapted to the fine patterning of TiO2 films using a very simplified UVA three-step lithography method. Mechanisms occurring during the photo-patterning procedure and a post-patterning thermal treatment have been studied by Fourier transform infrared spectroscopy, atomic force microscopy, X-ray diffraction, and ellipsometry. Discussions are proposed to support the influence of the photo-patterning procedure and post-patterning treatment on the shape and the dimension of so-formed microstructures. Original additional functionalities arising from such structures are also presented.
引用
收藏
页码：1474 / 1486
页数：13
相关论文
共 50 条
  • [21] Residual stress fields in sol-gel-derived thin TiO2 layers
    D. H. J. Teeuw
    M. de Haas
    J. Th. M. De Hosson
    Journal of Materials Research, 1999, 14 : 1896 - 1903
  • [22] CHARACTERIZATION OF SOL-GEL-DERIVED TIO2 COATINGS AND THEIR PHOTOEFFECTS ON COPPER SUBSTRATES
    YUAN, JN
    TSUJIKAWA, S
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (10) : 3444 - 3450
  • [23] Residual stress fields in sol-gel-derived thin TiO2 layers
    Teeuw, DHJ
    de Haas, M
    De Hosson, JTM
    JOURNAL OF MATERIALS RESEARCH, 1999, 14 (05) : 1896 - 1903
  • [24] TiO2 coating on silica particles by deposition of sol-gel-derived nanoparticles
    Ida, Junichi
    Yoshikawa, Tomoko
    Matsuyama, Tatsushi
    Yamamoto, Hideo
    ADVANCED POWDER TECHNOLOGY, 2007, 18 (03) : 329 - 348
  • [25] The photoconductivity of sol-gel derived TiO2 films
    Brajsa, A
    Szaniawska, K
    Barczynski, RJ
    Murawski, L
    Koscielska, B
    Vomvas, A
    Pomoni, K
    OPTICAL MATERIALS, 2004, 26 (02) : 151 - 153
  • [26] Sol-gel-derived super-hydrophilic nickel doped TiO2 film as active photo-catalyst
    Sharma, Sunil Dutta
    Singh, Davinder
    Saini, K. K.
    Kant, Chander
    Sharma, Vikash
    Jain, S. C.
    Sharma, C. P.
    APPLIED CATALYSIS A-GENERAL, 2006, 314 (01) : 40 - 46
  • [27] Photocatalytic activity of sol-gel-derived mesoporous TiO2 thin films for reactive orange 16 degradation
    Patil, Suhas R.
    Akpan, U. G.
    Hameed, B. H.
    DESALINATION AND WATER TREATMENT, 2015, 53 (13) : 3604 - 3614
  • [28] Transferability and Adhesion of Sol-Gel-Derived Crystalline TiO2 Thin Films to Different Types of Plastic Substrates
    Amano, Natsumi
    Takahashi, Mitsuru
    Uchiyama, Hiroaki
    Kozuka, Hiromitsu
    LANGMUIR, 2017, 33 (04) : 947 - 953
  • [29] Formation of TiO2(B) nanocrystallites in sol-gel-derived SiO2-TiO2 film
    Kogure, T
    Umezawa, T
    Kotani, Y
    Matsuda, A
    Tatsumisago, M
    Minami, T
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1999, 82 (11) : 3248 - 3250
  • [30] Photocatalytic activity and photo-induced superhydrophilicity of sol-gel derived TiO2 films
    Langlet, A.
    Permpoon, S.
    Riassetto, D.
    Berthome, G.
    Pernot, E.
    Joud, J. C.
    JOURNAL OF PHOTOCHEMISTRY AND PHOTOBIOLOGY A-CHEMISTRY, 2006, 181 (2-3) : 203 - 214
12345