Analysis of conductor loss in interdigital capacitor based measurement of dielectric constant of ferroelectric thin film

被引：3
|
作者：
Wang, P. [1 ]
Tan, C. Y. [1 ]
Ma, Y. G. [1 ]
Cheng, W. N. [1 ]
Ong, C. K. [1 ]
机构：
[1] Natl Univ Singapore, Dept Phys, Ctr Supercond & Magnet Mat, Singapore 117542, Singapore
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2008年 / 50卷 / 03期
关键词：
ferroelectric; BST; interdigital capacitor; dielectric measurements; varactor;
D O I：
10.1002/mop.23141
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A procedure to include conductor loss in interdigital capacitor based dielectric constant measurements is proposed. The effect of conductor loss and contact resistance can be regarded as a series resistor connected to the interdigital capacitor. If the thickness of the conductor film is known, the conductor loss could be calculated and subtracted from the measurement results. In the frequency range where the dielectric constant of the material in test does not change with frequency, the conductor loss could also be obtained by measuring the frequency dependence of the impedance of the interdigital capacitor. (c) 2008 Wiley Periodicals, Inc.
引用
收藏
页码：566 / 568
页数：3
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