Thermoelectrically driven melt motion during floating zone crystal growth with an axial magnetic field

被引:4
|
作者
Khine, YY [1 ]
Walker, JS [1 ]
机构
[1] Univ Illinois, Dept Mech & Ind Engn, Urbana, IL 61801 USA
关键词
D O I
10.1115/1.2820748
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
During semiconductor crystal growth with an externally applied magnetic field, thermoelectric currents may drive a melt circulation which affects the properties of the crystal. This paper treats a model problem for a floating zone process with a uniform axial magnetic field, with planar solid-liquid interfaces, with a cylindrical free surface, with a parabolic temperature variation along the crystal-melt interface, and with an isothermal feed rod-melt interface. The ratio of the electrical conductivities of the liquid and solid is a key parameter. The azimuthal velocity is much larger than the radial or axial velocity. There is radially outward flow near the crystal-melt interface which should be beneficial for the mass transport of dopants and species.
引用
收藏
页码:839 / 843
页数:5
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