Surface structure of molecular beam epitaxy (211)B HgCdTe

被引:16
|
作者
Benson, J. D. [1 ]
Almeida, L. A.
Carmody, M. W.
Edwall, D. D.
Markunas, J. K.
Jacobs, R. N.
Martinka, M.
Lee, U.
机构
[1] US Army RDECOM, CERDEC Night Vis & Elect Sensors Directorate, Ft Belvoir, VA USA
[2] Teledyne Imaging Sensors, Camarillo, CA USA
[3] US Army Res Lab, Adelphi, MD USA
关键词
hgCdTe; CdTe/Si; molecular beam epitaxy; atomic force microscopy; nano-ripple; nano-wire; cross-hatch;
D O I
10.1007/s11664-007-0143-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The as-grown molecular beam epitaxy (MBE) (211)B HgCdTe surface has variable surface topography, which is primarily dependent on substrate temperature and substrate/epilayer mismatch. Nano-ripple formation and cross-hatch patterning are the predominant structural features observed. Nano-ripples preferentially form parallel to the [111] and are from 0 angstrom to 100 angstrom in height with a wavelength between 0.1 mu m and 0.8 mu m. Cross-hatch patterns result from slip dislocations in the three {111} planes intersecting the (211) growth surface. The cross-hatch step height is 4 +/- angstrom (limited data set). This indicates that only a bi-layer slip (Hg/Cd + Te) in the {111} slip plane occurs. For the deposition of MBE (211)B HgCdTe/CdTe/Si, the reorientation of multiple nano-ripples coalesced into "packets" forms cross-hatch patterns. The as-grown MBE (211)B CdTe/Si surface is highly variable but displays nanoripples and no cross-hatch pattern. Three types of defects were observed by atomic force microscopy (AFM): needle, void/hillock, and voids.
引用
收藏
页码:949 / 957
页数:9
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