Evaluation of hardness of ultrathin films by nanoindentation method

被引：0
|
作者：
Takai, O [1 ]
机构：
[1] Nagoya Univ, Grad Sch Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2001年 / 46卷 / 06期
关键词：
nanoindentation; hardness; ultra-thin film; DLC; carbon nitride; quartz glass;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：447 / 454
页数：8
相关论文
共 50 条
  • [31] Influence of the residual stress on the nanoindentation-evaluated hardness for zirconium nitride films
    Meng, Q. N.
    Wen, M.
    Hu, C. Q.
    Wang, S. M.
    Zhang, K.
    Lian, J. S.
    Zheng, W. T.
    SURFACE & COATINGS TECHNOLOGY, 2012, 206 (14): : 3250 - 3257
  • [32] Effect of substrate bias on nanoindentation hardness and microstructure of polycrystalline copper thin films
    Wang, F
    Xu, KW
    RARE METAL MATERIALS AND ENGINEERING, 2004, 33 (05) : 531 - 533
  • [33] INSITU NANOINDENTATION HARDNESS APPARATUS FOR MECHANICAL CHARACTERIZATION OF EXTREMELY THIN-FILMS
    BHUSHAN, B
    WILLIAMS, VS
    SHACK, RV
    JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1988, 110 (03): : 563 - 571
  • [34] Hardness of silicon nitride thin films characterised by nanoindentation and nanoscratch deconvolution methods
    Liu, S.
    Huang, H.
    Gu, Y. T.
    MATERIALS SCIENCE AND TECHNOLOGY, 2012, 28 (9-10) : 1172 - 1176
  • [35] Extraction of elastic modulus and hardness of the soft metallic films on hard substrates by nanoindentation
    Zhou, X. Y.
    Wang, H. R.
    Jiang, Z. D.
    Yu, R. X.
    PRICM 6: SIXTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, PTS 1-3, 2007, 561-565 : 2005 - +
  • [36] Effect of substrate bias on nanoindentation hardness and microstructure of polycrystalline copper thin films
    Wang, Fei
    Xu, Kewei
    Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2004, 33 (05): : 531 - 533
  • [37] Variation in the nanoindentation hardness of platinum
    M. R. Maughan
    H. M. Zbib
    D. F. Bahr
    Journal of Materials Research, 2013, 28 : 2819 - 2828
  • [38] Variation in the nanoindentation hardness of platinum
    Maughan, M. R.
    Zbib, H. M.
    Bahr, D. F.
    JOURNAL OF MATERIALS RESEARCH, 2013, 28 (20) : 2819 - 2828
  • [39] Nanoindentation hardness of mineralized tissues
    Oyen, Michelle L.
    JOURNAL OF BIOMECHANICS, 2006, 39 (14) : 2699 - 2702
  • [40] A Modified Method for Hardness Determination from Nanoindentation Experiments with Imperfect Indenters
    Guo, Wei Chao
    Xu, Heng
    Gao, Xin Qin
    Hou, Xiao Li
    Li, Yan
    ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2016, 2016
12345