Modeling and diagnostics of low pressure inductively coupled plasmas

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作者：
Kortshagen, U [1 ]
机构：
[1] Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA
来源：
ELECTRON KINETICS AND APPLICATIONS OF GLOW DISCHARGES | 1998年 / 367卷
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O59 [应用物理学];
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页码：329 / 347
页数：19
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