Diagnostics of non-equilibrium inductively coupled plasmas in argon

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作者
Okigawa, A
Todokoro, M
Nakano, N
Makabe, T
Petrovic, ZL
Itoh, A
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O35 [流体力学]; O53 [等离子体物理学];
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070204 ; 080103 ; 080704 ;
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页码:410 / 413
页数:4
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