Homoepitaxial growth of GaN using molecular beam epitaxy

被引:32
|
作者
Gassmann, A
Suski, T
Newman, N
Kisielowski, C
Jones, E
Weber, ER
LilientalWeber, Z
Rubin, MD
Helava, HI
Grzegory, I
Bockowski, M
Jun, J
Porowski, S
机构
[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY NATL LAB,BERKELEY,CA 94720
[2] UNIV CALIF BERKELEY,DEPT MAT SCI,BERKELEY,CA 94720
[3] AMER XTAL TECHNOL,DUBLIN,CA 94568
[4] POLISH ACAD SCI,UNIPRESS,PL-01142 WARSAW,POLAND
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.363112
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this article, experimental results are presented for the homoepitaxial deposition of a GaN overlayer onto a bulk single-crystal GaN substrate using molecular beam epitaxy. Transmission electron microscopy shows a superior structural quality of the deposited GaN overlayer when compared to heteroepitaxially grown layers. Photoluminescence shows narrow excitonic emission (3.467 eV) and the very weak yellow luminescence, whereas the bulk substrate luminescence is dominated by this deep level emission. These results show that homoepitaxy of GaN can be used to establish benchmark values for the optoelectronic properties of GaN thin films. (C) 1996 American Institute of Physics.
引用
收藏
页码:2195 / 2198
页数:4
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