X-band epi-BAW resonators

被引：9

作者：

Zhao, Wenwen ^{[1
]}

Asadi, Mohammad Javad ^{[2
]}

Li, Lei ^{[2
]}

Chaudhuri, Reet ^{[2
]}

Nomoto, Kazuki ^{[2
]}

Xing, Huili Grace ^{[2
,3
,4
]}

Hwang, James C. M. ^{[2
,3
]}

Jena, Debdeep ^{[2
,3
,4
]}

机构：

[1] Cornell Univ, Sch Appl & Engn Phys, haca, Ithaca, NY 14853 USA

[2] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA

[3] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA

[4] Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA

来源：

JOURNAL OF APPLIED PHYSICS | 2022年 / 132卷 / 02期

关键词：

36;

D O I：

10.1063/5.0097458

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Using epitaxial aluminum nitride (AlN) developed for ultraviolet photonics and high-speed electronics, we demonstrate suspended AlN<br />thin-film bulk acoustic resonators (FBARs) at 9.2 GHz in the X-band (8-12 GHz) of the microwave spectrum. The resonators show a<br />Q(max)asymptotic to 614 and a figure of merit f.Q asymptotic to 5.6 THz. The material stack of these epi-AlN FBARs allows monolithic integration with AlN/GaN/AlN quantum well high-electron-mobility-transistors to a unique RF front end and also enable integration with epitaxial nitride superconductors for microwave filters for quantum computing.<br />Published under an exclusive license by AIP Publishing.

引用

页数：8

共 50 条

[41] A X-band SPDT Switch
Deng, Jiang
Gan, Xuchun
PROCEEDINGS OF THE 3RD WORKSHOP ON ADVANCED RESEARCH AND TECHNOLOGY IN INDUSTRY (WARTIA 2017), 2017, 148 : 453 - 456
[42] X-band linac design
Sullivan, M. S.
Jones, R. M.
Cowie, L. S.
Brynes, A. D.
Williams, P. H.
Yokoya, K.
PHYSICAL REVIEW ACCELERATORS AND BEAMS, 2021, 24 (08)
[43] X-band triaxial klystron
Pasour, J
Smithe, D
Ludeking, L
HIGH ENERGY DENSITY AND HIGH POWER RF, 2003, 691 : 141 - 150
[44] A NANOSECOND X-BAND SWITCH
YOUNG, MC
PRINSEN, HW
BLUM, RJ
TRIPP, BR
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1967, 55 (12): : 2185 - &
[45] X-BAND MICROSTRIP CIRCULATOR
HERSHENOV, B
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (12): : 2022 - +
[46] An X-band SQUID multiplexer
Hahn, I.
Bumble, B.
LeDuc, H. G.
Weilert, A.
Day, P.
LOW TEMPERATURE PHYSICS, PTS A AND B, 2006, 850 : 1613 - +
[47] STUDY OF X-BAND HEATING
OGURA, K
NAMBA, I
ARAI, S
ITOH, K
JOURNAL OF MICROWAVE POWER AND ELECTROMAGNETIC ENERGY, 1979, 14 (03) : 269 - 273
[48] Design of a Compact Dual-Band Microstrip Antenna Enabled by Complementary Split Ring Resonators for X-Band Applications
Hamad, Ehab K. I.
Hamdalla, Mohamed Z. M.
ADVANCED ELECTROMAGNETICS, 2018, 7 (03) : 82 - 86
[49] X-band GaNFET rellability
Jimenez, J. L.
Chowdhury, U.
2008 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 46TH ANNUAL, 2008, : 429 - +
[50] AN X-BAND SWEEP OSCILLATOR
OLIN, ID
PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1953, 41 (01): : 10 - 13

← 1 2 3 4 5 →