NEMS SPECTROMETER-ON-A-CHIP

This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light in nano-waveguides, which can effectively reduce the spectrometer chip size (1 cm x 1 cm) and lower the power consumption (< 10 mW), while maintaining high resolution (< 40 cm(-1)). It has high potential applications in biomedical and physical spectroscopy field.