Effect of tin incorporation on physicochemical properties of ZnO films prepared by spray pyrolysis

被引:52
|
作者
Bougrine, A
Addou, M
Kachouane, A
Bérnède, JC
Morsli, M
机构
[1] Univ Ibn Tofail, Fac Sci, Lab Optoelect & PhysChim Mat, Maroc, France
[2] Univ Nantes, Lab Phys Solides Electron, F-92208 Nantes 3, France
关键词
tin incorporation; ZnO films; spray pyrolysis;
D O I
10.1016/j.matchemphys.2003.11.033
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Spray pyrolysis system was used to obtain tin doped ZnO thin films on heated glass substrates. The structural, optical and electrical properties of the films were been studied. The effect of heat treatment for as deposited films in vacuum was studied. X-ray diffraction spectra showed that doping improves the crystallinity. Tin doped ZnO films with over 85% transmittance and conductivity as low as 5 x 10(-2) Omega CM were obtained. On the other hand, the annealing of as deposited films in vacuum leads to reduction of resistivity and improvement of crystallinity and optical transmission. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:247 / 252
页数:6
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