Effect of substrate temperature on the properties of ZnO thin films prepared by spray pyrolysis

被引：58

作者：

Zahedi, F. ^{[1
]}

Dariani, R. S. ^{[1
]}

Rozati, S. M. ^{[2
]}

机构：

[1] Alzahra Univ, Dept Phys, Tehran 1993893973, Iran

[2] Univ Guilan, Dept Phys, Rasht 4193833697, Iran

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2013年 / 16卷 / 02期

关键词：

ZnO film; Spray pyrolysis; Substrate temperature; Zinc acetate dehydrate; CHEMICAL-VAPOR-DEPOSITION; OPTICAL-PROPERTIES; ELECTRICAL-PROPERTIES; GROWTH;

D O I：

10.1016/j.mssp.2012.11.005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sprayed ZnO films were grown on glass at different substrate temperatures from 200 degrees C to 500 degrees C and their structural, optical and electrical properties were investigated. All films are polycrystalline with hexagonal wurtzite structure. ZnO films at substrate temperatures above 400 degrees C appear to be better crystalized with (002) plane as preferential orientation. Optical transmission spectrum shows that ZnO films have high transmission (above 80%) in visible region for substrate temperatures above 400 degrees C. Photoluminescence spectra at room temperature show an ultraviolet emission and two visible emissions at 2.82 eV and 2.37 eV. The resistivity of ZnO films increases with increasing substrate temperatures (above 400 degrees C). The ZnO film deposited at 400 degrees C shows highest figure of merit. (c) 2012 Elsevier Ltd. All rights reserved.

引用

页码：245 / 249

页数：5

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