e-Manufacturing in the semiconductor industry

被引：0
|
作者：
Tao, Mike [1 ]
Fowler, John
Chen, Thomas W. Y.
机构：
[1] Spansion Inc, Sunnyvale, CA 94088 USA
[2] Arizona State Univ, Tempe, AZ 85287 USA
[3] Taiwan Semicond Mfg Co, Technol Syst Integrat Div, Hsinchu 300, Taiwan
来源：
IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING | 2007年 / 4卷 / 04期
关键词：
D O I：
10.1109/TASE.2007.907381
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：485 / 487
页数：3
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