e-Manufacturing in the semiconductor industry

被引：0

作者：

Tao, Mike ^{[1
]}

Fowler, John

Chen, Thomas W. Y.

机构：

[1] Spansion Inc, Sunnyvale, CA 94088 USA

[2] Arizona State Univ, Tempe, AZ 85287 USA

[3] Taiwan Semicond Mfg Co, Technol Syst Integrat Div, Hsinchu 300, Taiwan

来源：

关键词：

D O I：

10.1109/TASE.2007.907381

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：485 / 487

页数：3

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