Texture evolution during crystallization of thin amorphous films

被引:0
|
作者
Liu, QKK [1 ]
Schumacher, G [1 ]
机构
[1] Hahn Meitner Inst Berlin GmbH, D-14109 Berlin, Germany
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中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Stress and energy distributions for crystallization of a thin amorphous film are calculated by means of 3D finite element method. The changes in energy are caused by elastic strain induced by different thermal expansion of the film and the substrate and by different mass densities of the crystal and the surrounding amorphous matrix. The calculations were performed for cubic crystal structure and for disc shaped crystals. Three crystal orientations (001), (011) and (111) were considered. Based on strain energy considerations the (001) orientation of crystals with respect to the film plane is energetically more favorable than (011) and (111) orientations. Interfacial and surface energies are certain to play a part in these effects as well.
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页码:195 / 200
页数:6
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