A MEMS mid-infrared thermal source for NDIR gas analyzers

被引：0

作者：

Ji, XM ^{[1
]}

Wu, FD ^{[1
]}

Xie, HF ^{[1
]}

Jia, Z ^{[1
]}

Bao, ZM ^{[1
]}

Huang, YP ^{[1
]}

机构：

[1] Fudan Univ, State Key Lab ASIC, Shanghai 200433, Peoples R China

来源：

2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS | 2004年

关键词：

IR; direct modulation; emissivity;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A mid-IR thermal source based on electrical heating of a Platinum film has been studied. The IR source, with effectively emitting area diameters of 1.6mm, is obtained from heated platinum thin film resistors that deposit on a Si3N4/SiO2 membrane. The IR source can emit wideband infrared light with a peak wavelength of lambda = 2.62 mu m at 1106K and be adapted to direct modulation with variable voltage. Appropriate heat transfer makes it possible to reach a modulation frequency as high as 50Hz. Such specifications meet the requirements of the various IR gas sensors and can be regarded as a new thermal IR sources to be used in NDIR (non-dispersive infrared) gas analyzers.

引用

页码：1731 / 1734

页数：4

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