A MEMS mid-infrared thermal source for NDIR gas analyzers

被引：0
|
作者：
Ji, XM [1 ]
Wu, FD [1 ]
Xie, HF [1 ]
Jia, Z [1 ]
Bao, ZM [1 ]
Huang, YP [1 ]
机构：
[1] Fudan Univ, State Key Lab ASIC, Shanghai 200433, Peoples R China
来源：
2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS | 2004年
关键词：
IR; direct modulation; emissivity;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A mid-IR thermal source based on electrical heating of a Platinum film has been studied. The IR source, with effectively emitting area diameters of 1.6mm, is obtained from heated platinum thin film resistors that deposit on a Si3N4/SiO2 membrane. The IR source can emit wideband infrared light with a peak wavelength of lambda = 2.62 mu m at 1106K and be adapted to direct modulation with variable voltage. Appropriate heat transfer makes it possible to reach a modulation frequency as high as 50Hz. Such specifications meet the requirements of the various IR gas sensors and can be regarded as a new thermal IR sources to be used in NDIR (non-dispersive infrared) gas analyzers.
引用
收藏
页码：1731 / 1734
页数：4
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