Control System Design for Piezoelectric Actuator Based on Hysteresis Compensation

被引：0
|
作者：
Liu, Yanfang [1 ,2 ]
Shan, Jinjun [2 ]
Qi, Naiming [1 ]
机构：
[1] Harbin Inst Technol, Dept Astronaut Engn, Harbin 150006, Peoples R China
[2] York Univ, Dept Earth & Space Sci & Engn, N York, ON M3J 1P3, Canada
来源：
2014 EUROPEAN CONTROL CONFERENCE (ECC) | 2014年
关键词：
piezoactuator (PEA); nano-positioning; proportional plus integral (PI) control; hysteresis; linearization; INVERSE-FEEDFORWARD; TRACKING CONTROL; CREEP;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
To improve the performance of piezo nano-positioning system, feedback controller is designed based on the linearized hysteresis-compensated model of piezoelectric actuator (PEA). Nonlinear hysteresis is compensated for using Maxwell resistive capacitor (MRC) model. Then, a linear system is identified with this hysteresis-compensated dynamics. Based on the identified linear model, a trajectory preshaping method is employed for open-loop scanning application and a proportional plus integral (PI) controller is designed for closed-loop tracking application. Experimental results demonstrate the effectiveness of the proposed method.
引用
收藏
页码：2028 / 2033
页数：6
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