Development and construction of rotating polarizer analyzer ellipsometer

被引：27
|
作者：
El-Agez, Taher M. [1 ]
Taya, Sofyan A. [1 ]
机构：
[1] Islamic Univ Gaza, Dept Phys, Gaza, Israel
来源：
OPTICS AND LASERS IN ENGINEERING | 2011年 / 49卷 / 04期
关键词：
Ellipsometry; Rotating polarizer analyzer ellipsometer; Optical properties of Au; ZnSe; SiO2; SCANNING ELLIPSOMETER; SPECTROSCOPIC ELLIPSOMETRY; OPTICAL-PROPERTIES; FILMS; AU;
D O I：
10.1016/j.optlaseng.2011.01.005
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A detailed mathematical derivation and an experimental characterization of one to two ratio rotating polarizer analyzer ellipsometer (RPAE) are presented. The alignment, calibration, and testing of reference samples are also discussed. The optical properties of some known materials obtained by the proposed ellipsometer will be shown and compared to accepted values. Moreover, the constructed ellipsometer will be tested using two ellipsometry standards with different thicknesses. (C) 2011 Elsevier Ltd. All rights reserved.
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页码：507 / 513
页数：7
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