Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment

被引：47

作者：

Colombi, P. ^{[1
]}

Agnihotri, D. K.

Asadchikov, V. E. ^{[2
]}

Bontempi, E. ^{[1
]}

Bowen, D. K.

Chang, C. H.

Depero, L. E. ^{[1
]}

Farnworth, M. ^{[3
]}

Fujimoto, T. ^{[4
]}

Gibaud, A.

Jergel, M. ^{[5
]}

Krumrey, M. ^{[6
]}

Lafford, T. A.

Lamperti, A. ^{[7
]}

Ma, T.

Matyi, R. J. ^{[8
]}

Meduna, M. ^{[9
]}

Milita, S. ^{[10
]}

Sakurai, K. ^{[11
]}

Shabel'nikov, L. ^{[12
]}

Ulyanenkov, A. ^{[13
]}

Van der Lee, A. ^{[14
]}

Wiemer, C. ^{[15
]}

机构：

[1] Univ Brescia, Tech Chem Lab, Brescia, Italy

[2] Russian Acad Sci, Xray Reflect Inst Crystallog, Moscow 117901, Russia

[3] Pilkington European Tech Ctr, Lathom, England

[4] AIST, NMII, Surface & Thin Film Standards Sect, Tsukuba, Ibaraki, Japan

[5] Inst Phys SAS, Bratislava, Slovakia

[6] Phys Tech Bundesanstalt, Berlin, Germany

[7] Univ Durham, Dept Phys, Durham DH1 3HP, England

[8] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12222 USA

[9] Masaryk Univ, Dept Phys Mat Condensee, Brno, Czech Republic

[10] CNR IMM, Bologna, Italy

[11] Natl Inst Mat Sci, Tsukuba, Ibaraki 3050047, Japan

[12] RAS, Inst Microelect Technol, Moscow, Russia

[13] Bruker AXS GmbH, Res Dept, Karlsruhe, Germany

[14] Univ Montpellier 2, Inst Europeen Membranes, UMR 5635, F-34095 Montpellier 5, France

[15] CNR, INFM, Lab MDM, Agrate Brianza, Italy

来源：

JOURNAL OF APPLIED CRYSTALLOGRAPHY | 2008年 / 41卷

关键词：

D O I：

10.1107/S0021889807051904

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

X-ray reflectometry (XRR) is a well established technique to evaluate quantitatively electron density, thickness and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving 20 laboratories, are presented and discussed. The round-robin experiment was performed within the framework of the VAMAS Project 'X-ray reflectivity measurements for evaluation of thin films and multilayers', the aim of which is to produce a 'good practice' manual for XRR. The reproducibility of measurements obtained using different equipment has been investigated. The influence of the fitting of the experimental data was shown to be non-negligible compared with the experimental factors. The dynamic intensity range proves to be an important parameter for obtaining a good quality measurement. A simpler test sample which does not develop a surface oxide layer over time is now the subject of a follow-up study.

引用

页码：143 / 152

页数：10

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