Micro-shaping of metallic glass by wire electrochemical micro-machining with a reciprocating traveling workpiece

被引:17
|
作者
Meng, Lingchao [1 ,2 ]
Zeng, Yongbin [1 ,2 ]
Fang, Xiaolong [1 ,2 ]
Zhu, Di [1 ,2 ]
机构
[1] Nanjing Univ Aeronaut & Astronaut, Coll Mech & Elect Engn, Nanjing 210016, Jiangsu, Peoples R China
[2] Jiangsu Key Lab Precis & Micromfg Technol, Nanjing 210016, Jiangsu, Peoples R China
基金
中国国家自然科学基金;
关键词
Metallic glass; Polarization characteristic; Complex microstructures; Reciprocating traveling workpiece; Mass transport; MICROELECTROMECHANICAL SYSTEMS MEMS; PASSIVE ELECTRODES;
D O I
10.1016/j.jallcom.2017.12.157
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Metallic glasses exhibit many outstanding properties, such as high hardness and strength, but their micro-shaping is still challenging. The technique of wire electrochemical micro-machining (WECMM) with a reciprocating traveling workpiece is proposed firstly for complex micro-shaping of metallic glasses. WECMM has increasingly become recognized as a versatile technique for producing planar contour micro-features, and holds promise for the micro-shaping of metallic glass structures. In WECMM, the processing performance is significantly affected by the mass transport rate in the narrow inter-electrode gap. Therefore, a new method with a reciprocating traveling workpiece is developed to enhance mass transport. Analysis of the electric field and flow field indicates that the reciprocating motion of the workpiece can facilitate active removal of electrolysis products and rapid refreshment of electrolyte, both of which are beneficial for maintaining a stable current density distribution on the machining surface. Taking a Ni-based metallic glass, Ni72Cr19Si7B2, as an example, the polarization and processing characteristics in dilute acid electrolyte are investigated. An overall improvement in processing performances is achieved. Finally, several complex five-layered microstructures are fabricated successfully using the optimized parameters. The resulting surface roughnesses R-a and R-max are just 0.018 mm and 0.225 mu m, respectively. The total machining efficiency in terms of feed rate reaches 4.0 mu m/s. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码:235 / 248
页数:14
相关论文
共 50 条
  • [41] Double-pulsed wire electrochemical micro-machining of type-304 stainless steel
    Gao, Chuanping
    Qu, Ningsong
    He, Haidong
    Meng, Lingchao
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2019, 266 (381-387) : 381 - 387
  • [42] Micro-Shaping of Pure Aluminum in Long-Duration Wire Electrochemical Micromachining Using Bipolar Nanosecond Pulses
    Bi, Xiaolei
    Jia, Meng
    Meng, Lingchao
    MICROMACHINES, 2023, 14 (05)
  • [43] Simulation of erosive smoothing in the abrasive jet micro-machining of glass
    Jafar, R. Haj Mohammad
    Papini, M.
    Spelt, J. K.
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2013, 213 (12) : 2254 - 2261
  • [44] Study on Electrochemical and electrical discharge compound Micro-machining for Silicon
    Chen, Hui
    Shi, Lei
    2019 INTERNATIONAL CONFERENCE ON ADVANCED ELECTRONIC MATERIALS, COMPUTERS AND MATERIALS ENGINEERING (AEMCME 2019), 2019, 563
  • [45] Fundamental Research on Electrochemical Micro-machining by Using Water as the Electrolyte
    Yang, Ye
    Natsu, Wataru
    Zhao, Wansheng
    PROCEEDINGS OF THE 16TH INTERNATIONAL SYMPOSIUM ON ELECTROMACHINING, 2010, 2010, : 307 - 311
  • [46] Super finishing with ultrasonic and magnetic assistance in electrochemical micro-machining
    Pa, P. S.
    ELECTROCHIMICA ACTA, 2009, 54 (25) : 6022 - 6027
  • [47] Vibration assisted wire electrochemical micro machining of array micro tools
    Xu, Kun
    Zeng, Yongbin
    Li, Peng
    Zhu, Di
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2017, 47 : 487 - 497
  • [48] Compensation method of wire electrode wear for reciprocating micro wire electrical discharge machining
    Zhang, Ming
    Guo, Huafeng
    Guo, Chuangchuang
    Qiu, Mingbo
    Liu, Zhidong
    JOURNAL OF MANUFACTURING PROCESSES, 2023, 86 : 136 - 142
  • [49] Experimental Study on Ultrasonic Assisted Electrochemical Micro-Machining of Micro-Dimple Array Structure
    Ge Yongcheng
    Chen Wangwang
    Zhu Yongwei
    INTERNATIONAL JOURNAL OF ELECTROCHEMICAL SCIENCE, 2021, 16 (01): : 1 - 8
  • [50] Micro-machining and Process Optimization of Electrochemical Discharge Machining (ECDM) Process by TOPSIS Method
    Singh, Manpreet
    Singh, Sarbjit
    ADVANCES IN MANUFACTURING II, VOL 2 - PRODUCTION ENGINEERING AND MANAGEMENT, 2019, : 206 - 215