Understanding organic thin-film transistor fabrication based on application-relevant deposition and patterning techniques

被引:3
|
作者
Strecker, Michael [1 ,2 ]
Brill, Jochen [3 ,4 ]
Koehler, Silke [3 ,4 ]
Weitz, Ralf Thomas [3 ,4 ]
Fruehauf, Norbert [1 ,2 ]
机构
[1] Univ Stuttgart, Inst Large Area Microelect, D-70569 Stuttgart, Germany
[2] Univ Stuttgart, Stuttgart Res Ctr Photon Engn, SCoPE, D-70569 Stuttgart, Germany
[3] BASF SE, D-67056 Ludwigshafen, Germany
[4] Innovat Lab GmbH, D-69115 Heidelberg, Germany
关键词
top-contacts; inkjet printing; morphology; organic semiconductors; photolithography; thin-film transistors; ENERGY-LEVEL ALIGNMENT; PENTACENE; INTERFACES; DISPLAY;
D O I
10.1002/pssa.201431881
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, the focus is on understanding organic thin-film transistor fabrication based on application-relevant processing techniques like inkjet printing for deposition of the semiconductor and patterning of top-contacts using conventional photolithography and etching. A clear relation between the morphology of the semiconductor film resulting from the printing process and the measured device characteristics is found and thus a suitable thin-film transistors (TFT) design aiming at optimized electrical behavior and minimized device-to-device variations is demonstrated. We furthermore show that the organic semiconductor withstands conventional photolithography and etching on top of the polymeric film using either Ag or Au as contact material. Based on the great processing versatility of the semiconductor, short-channel bottom-gate staggered TFTs with a lowered contact resistance are demonstrated. Further improvement of the device performance is attained by optimization of the gate dielectric leading to low-voltage devices with a field-effect mobility in the range of 0.06 cm(2) V(-1)s(-1).
引用
收藏
页码:1634 / 1642
页数:9
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