Noncontact three-dimensional surface profiling using reflected-light holographic confocal microscopy

被引：0
|
作者：
Antosová, I [1 ]
Harna, Z [1 ]
机构：
[1] Brno Univ Technol, Inst Engn Phys, Fac Mech Engn, CZ-61669 Brno, Czech Republic
来源：
PHOTONICS, DEVICES, AND SYSTEMS II | 2003年 / 5036卷
关键词：
confocal microscopy; profilometry; 3D imaging; real-time imaging;
D O I：
10.1117/12.498523
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This article deals with an application of the broad-source image plane holography, which offers nonscanning confocal imaging, i.e., real time imaging. We have developed a laboratory version of a holographic confocal microscope (HCM). By the measurement of the axial intensity response for a perfect plane mirror we have verified the confocal imaging capability with the depth discrimination. The noncontact surface profiling possibility was verified by processing series of optical sections with consequent 3D reconstruction of the real surface profile.
引用
收藏
页码：499 / 504
页数：6
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