Micromechanical microphone using sideband modulation of nonlinear resonators

被引：3

作者：

Boales, Joseph A. ^{[1
]}

Mateen, Farrukh ^{[2
]}

Mohanty, Pritiraj ^{[1
]}

机构：

[1] Boston Univ, Dept Phys, 590 Commonwealth Ave, Boston, MA 02215 USA

[2] Boston Univ, Dept Mech & Aerosp Engn, 110 Cummington St, Boston, MA 02215 USA

来源：

APPLIED PHYSICS LETTERS | 2017年 / 111卷 / 09期

关键词：

NOISE; PRESSURE;

D O I：

10.1063/1.4996993

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270 x 96-mu m resonator was shown to be reliable in audio detection for sound intensity levels as low as ambient room noise and to have an unamplified sensitivity of 23.9 mu V/Pa. Such an approach may be adapted in acoustic sensors and microphones for consumer electronics or medical equipment such as hearing aids. Published by AIP Publishing.

引用

页数：4

共 50 条

[31] Spatial Modulation of Nonlinear Flexural Vibrations of Membrane Resonators
Yang, Fan
Rochau, Felix
Huber, Jana S.
Brieussel, Alexandre
Rastelli, Gianluca
Weig, Eva M.
Scheer, Elke
PHYSICAL REVIEW LETTERS, 2019, 122 (15)
[32] ELECTROSTATIC ACTIVATION OF MICROMECHANICAL RESONATORS
FATAH, RMA
ELECTRONICS LETTERS, 1991, 27 (02) : 166 - 168
[33] NONLINEAR PHASE MODULATION IN OPTICAL FIBER RING RESONATORS
IOANNIDIS, ZK
GILES, IP
APPLIED OPTICS, 1988, 27 (15): : 3058 - 3059
[34] Process compensated micromechanical resonators
Ho, Gavin K.
Perng, John K. C.
Ayazi, Farrokh
PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 2007, : 1 - 4
[35] MICROMECHANICAL RESONATORS IN FIBEROPTIC SYSTEMS
VENKATESH, S
NOVAK, S
OPTICS LETTERS, 1987, 12 (02) : 129 - 131
[36] Thermoelastic damping in micromechanical resonators
Metcalf, Thomas H.
Pate, Bradford B.
Photiadis, Douglas M.
Houston, Brian H.
APPLIED PHYSICS LETTERS, 2009, 95 (06)
[37] Exploiting nonlinear amplitude-frequency dependence for temperature compensation in silicon micromechanical resonators
Defoort, M.
Taheri-Tehrani, P.
Horsley, D. A.
APPLIED PHYSICS LETTERS, 2016, 109 (15)
[38] Visualization of mode shapes in unelectroded quartz crystal resonators using a microphone
Watanabe, Yasuaki
Ozaki, Kiyoharu
Goka, Shigeyoshi
Sato, Takayuki
Sekimoto, Hitoshi
Acoustical Science and Technology, 2001, 22 (01) : 45 - 46
[39] Resolved Sideband Laser Cooling of a Cryogenic Micromechanical Membrane
Jayich, A. M.
Sankey, J. C.
Petrenko, A. A.
Harris, J. G. E.
2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2011,
[40] Sideband cooling of micromechanical motion to the quantum ground state
Teufel, J. D.
Donner, T.
Li, Dale
Harlow, J. W.
Allman, M. S.
Cicak, K.
Sirois, A. J.
Whittaker, J. D.
Lehnert, K. W.
Simmonds, R. W.
NATURE, 2011, 475 (7356) : 359 - 363

← 1 2 3 4 5 →