Micromechanical microphone using sideband modulation of nonlinear resonators

被引：3
|
作者：
Boales, Joseph A. [1 ]
Mateen, Farrukh [2 ]
Mohanty, Pritiraj [1 ]
机构：
[1] Boston Univ, Dept Phys, 590 Commonwealth Ave, Boston, MA 02215 USA
[2] Boston Univ, Dept Mech & Aerosp Engn, 110 Cummington St, Boston, MA 02215 USA
来源：
APPLIED PHYSICS LETTERS | 2017年 / 111卷 / 09期
关键词：
NOISE; PRESSURE;
D O I：
10.1063/1.4996993
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270 x 96-mu m resonator was shown to be reliable in audio detection for sound intensity levels as low as ambient room noise and to have an unamplified sensitivity of 23.9 mu V/Pa. Such an approach may be adapted in acoustic sensors and microphones for consumer electronics or medical equipment such as hearing aids. Published by AIP Publishing.
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页数：4
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