Design Space Exploration For Hotspot Detection

被引：0

作者：

Reddy, Gaurav Rajavendra ^{[1
]}

Makris, Yiorgos ^{[1
]}

机构：

[1] Univ Texas Dallas, Dept Elect & Comp Engn, Richardson, TX 75080 USA

来源：

2019 20TH INTERNATIONAL WORKSHOP ON MICROPROCESSOR/SOC TEST, SECURITY AND VERIFICATION (MTV 2019) | 2019年

关键词：

D O I：

10.1109/MTV48867.2019.00022

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

Advanced technology nodes suffer from high systematic defectivity. A significant part of such defectivity is caused by Lithographic Hotspots. Hotspots are Design Rule Check (DRC) clean areas of a layout which tend to show abnormal variation due to complex design-process interactions. In the past decade, we have witnessesed several Pattern Matching (PM) and Machine Learning (ML)-based hotspot detection solutions. However, there is little research towards addressing two pressing needs of the industry: (a) Development of hotspot detection models during early stages of technology development, and (b) Detecting Truly-Never-Seen-Before (TNSB) hotspots in incoming layouts. In this work, we propose solutions to address these issues and quantitatively demonstrate the effectiveness of the proposed methodologies.

引用

页码：73 / 77

页数：5

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