共 50 条
- [27] Near-field acoustic levitation of 8'' Si wafer and glass substrate using flexural vibration INSTITUTE OF ENVIRONMENTAL SCIENCES 1996 PROCEEDINGS - CONTAMINATION CONTROL: SYMPOSIUM ON MINIENVIRONMENTS/42ND ANNUAL TECHNICAL MEETING - EXPANDING OUR TECHNICAL EXCELLENCE THROUGH EDUCATION, 1996, : 500 - 505
- [29] Levitating Force and Stability Analysis of Near-field Acoustic Levitation using Flexural Vibrations of the Plate Acoustical Physics, 2021, 67 : 120 - 127