Development of spectroscopic transmission-type four detector polarimeter

被引:0
|
作者
Tsuru, T. [1 ]
Kubota, Y. [1 ]
Tadokoro, T. [2 ]
Kawabata, S. [3 ]
机构
[1] Tohoku Univ, IMRAM, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Technosynergy Inc, Hachioji 1930832, Japan
[3] Tokyo Polytech Univ, Kanagawa 2430297, Japan
关键词
Polarimetry; Ellipsometry; Polarization; Polarized light; BY-LAYER ANALYSIS; MULTILAYER FABRICATION; ELLIPSOMETER; POLARIZATION;
D O I
10.1016/j.tsf.2010.12.044
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have developed a spectroscopic transmission-type four detector polarimeter (T-FDP). It consists of a detector head and a multichannel spectrometer equipped with a two-dimensional CCD detector. Inside the T-FDP, three cubic beam splitters are aligned in a straight line and they are rotated relative to each other. From the responses of the spectroscopic T-FDP to five inputs with known polarization states it is possible to determine the characteristic matrices of the T-FDP at various wavelengths. The trajectories of the experimentally measured polarization states on the Poincare sphere agree well with theoretical predictions. These results demonstrate the feasibility of using the T-FDP for spectroscopic ellipsometry. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:2707 / 2710
页数:4
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