A 460 GHz MEMS-Based Single-Pole Double-Throw Waveguide Switch

被引：0
|
作者：
Reck, Theodore [1 ]
Jung-Kubiak, Cecile [1 ]
Chattopadhyay, Goutam [1 ]
机构：
[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA
来源：
2018 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM - IMS | 2018年
关键词：
RF-MEMS; micromachining; submillimeter-wave;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The design, fabrication and measurement of a 460 GHz MEMS-based single-pole double-throw (SPDT) wave-guide switch is presented. A silicon etched large-deflection actuator is applied to create two reflective switches that are combined to form the double-throw switch. A hybrid packaging approach combining the silicon MEMS actuator with a metal CNC-milled waveguide housing enables direct integration with standard waveguide components. Insertion loss for the packaged device is 1 dB or less with a return loss of greater than 23 dB across a 17% fractional bandwidth. To the author's knowledge, this is the highest frequency, lowest-loss SPDT switch that has been demonstrated.
引用
收藏
页码：773 / 775
页数：3
相关论文
共 50 条
  • [1] 500-750 GHz Contactless Rotating MEMS Single-Pole Double-Throw Waveguide Switch
    Rahiminejad, Sofia
    van Berkel, Sven
    Lin, Robert
    Khanal, Subash
    Jung-Kubiak, Cecile
    Chattopadhyay, Goutam
    Rais-Zadeh, Mina
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2024, : 532 - 542
  • [2] A new single-pole double-throw MEMS switch topology
    Farina, M
    Farinelli, P
    Mezzanotte, P
    Sorrentino, R
    Blondy, P
    [J]. 34TH EUROPEAN MICROWAVE CONFERENCE, VOLS 1-3, CONFERENCE PROCEEDINGS, 2004, : 1429 - 1431
  • [3] RF Single-Pole Double-Throw Switch Based on Memistor
    Vavra, Jiri
    Bajer, Josef
    Biolek, Dalibor
    [J]. 2018 IEEE RADIO AND ANTENNA DAYS OF THE INDIAN OCEAN (RADIO), 2018,
  • [4] Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch
    Takabayashi, Alain Yuji
    Sattari, Hamed
    Edinger, Pierre
    Verheyen, Peter
    Gylfason, Kristinn B.
    Bogaerts, Wim
    Quack, Niels
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021, 30 (02) : 322 - 329
  • [5] Fabrication and analysis of radiofrequency MEMS series capacitive single-pole double-throw switch
    Bansal, Deepak
    Bajpai, Anuroop
    Kumar, Prem
    Kaur, Maninder
    Rangra, Kamaljit
    [J]. JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2016, 15 (04):
  • [6] Narrowband Single-Pole Double-Throw Filtering Switch Based on Dielectric Resonator
    Xu, Jin-Xu
    Zhang, Xiu Yin
    Li, Hui-Yang
    Yang, Yang
    [J]. IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2018, 28 (07) : 594 - 596
  • [7] Single-pole double-throw switches using capacitive MEMS switches
    Maiczewski, A
    Pillans, B
    [J]. INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2004, 14 (04) : 383 - 387
  • [8] A 15-GHz single-pole double-throw annular MOSFET switch for space application
    Wang, L
    Sun, PP
    Rajashekharaiah, M
    Heo, D
    Champion, CL
    Larue, GS
    [J]. 2005 IEEE Workshop on Microelectronics and Electron Devices, 2005, : 103 - 106
  • [9] Design of a Compact Dual-Band Absorptive Single-Pole Double-Throw Switch
    Lin, Yo-Shen
    Deng, Li-Wen
    [J]. IEEE SOLID-STATE CIRCUITS LETTERS, 2022, 5 : 90 - 93
  • [10] A Microwave Single-Pole Double-Throw T/R Switch Integrating Bandpass Response
    Ji, Yu-Xue
    Li, Zhao-Zhao
    Wang, Huan
    Huang, Jin-Jie
    Xu, Jin
    [J]. 2016 CIE INTERNATIONAL CONFERENCE ON RADAR (RADAR), 2016,
12345