A 460 GHz MEMS-Based Single-Pole Double-Throw Waveguide Switch

被引：0
|
作者：
Reck, Theodore [1 ]
Jung-Kubiak, Cecile [1 ]
Chattopadhyay, Goutam [1 ]
机构：
[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA
来源：
2018 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM - IMS | 2018年
关键词：
RF-MEMS; micromachining; submillimeter-wave;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The design, fabrication and measurement of a 460 GHz MEMS-based single-pole double-throw (SPDT) wave-guide switch is presented. A silicon etched large-deflection actuator is applied to create two reflective switches that are combined to form the double-throw switch. A hybrid packaging approach combining the silicon MEMS actuator with a metal CNC-milled waveguide housing enables direct integration with standard waveguide components. Insertion loss for the packaged device is 1 dB or less with a return loss of greater than 23 dB across a 17% fractional bandwidth. To the author's knowledge, this is the highest frequency, lowest-loss SPDT switch that has been demonstrated.
引用
收藏
页码：773 / 775
页数：3
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