Electrical conduction behavior of ferroelectric Bi3.25La0.75Ti3O12 thin films prepared by a metalorganic decomposition method

被引:9
|
作者
Kim, KT [1 ]
Kim, CI [1 ]
机构
[1] Chung Ang Univ, Sch Elect & Elect Engn, Seoul 156756, South Korea
来源
关键词
BLT; thin film; MOD; FeRAM; electric properties;
D O I
10.1016/j.surfcoat.2003.08.021
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The voltage and temperature dependence of leakage currents densities of ferroelectric Bi3.25La0.75Ti3O12 (BLT) thin films using Pt electrode has been studied. The BLT thin films were prepared by metal organic decomposition (MOD) and the spin coating method onto a Pt/Ti/SiO2/Si substrate. X-Ray diffraction (XRD) studies revealed that BLT thin films were crystallized in the layered structure after annealing at 600 degreesC. The remanent polarization (2Pr) and coercive field of BLT films annealed at 650 degreesC were 25.66 muC/cm(2) and 84.75 kV/cm, respectively. The BLT thin films showed good fatigue endurance up to 3.5 X 10(9) bipolar cycling at 5 V and 50 kHz., The d.c. leakage current densities of the BLT thin films as a function of applied voltage and temperature can be explained by the Schottky emission model. The Schottky barrier height of the BLT thin films was estimated to be approximately 1.06 eV (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:774 / 778
页数:5
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