Floating zone growth of silicon in magnetic fields:: IV.: Rotating magnetic fields

被引:53
|
作者
Dold, P
Cröll, A
Lichtensteiger, M
Kaiser, T
Benz, KW
机构
[1] Univ Freiburg, Inst Kristallog, D-79104 Freiburg, Germany
[2] Tech Univ Freiberg, Inst NE Metalle & Reinststoffe, D-09599 Freiburg, Germany
[3] NASA, MSFC, USRA, Huntsville, AL 35812 USA
关键词
computer simulation; rotating magnetic fields; segregation; thermocapillary convection; floating zone technique; semiconducting silicon;
D O I
10.1016/S0022-0248(01)01491-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Transverse rotating magnetic fields (B-max = 7.5 mT, f(rot) = 50 Hz) were applied to the floating zone growth of doped silicon. Non-periodic dopant fluctuations caused by time-dependent thermocapillary convection were considerably reduced by the rotating field. The radial segregation profiles (measured by a spreading resistance probe) became more homogeneous and more symmetric. The transition from a regime dominated by time-dependent thermocapillary convection to a flow state characterized by the rotating magnetic field was determined. This threshold depends on the height of the melt as well as the melt diameter (crystals between 8 and 14 mm have been investigated) and the efficiency of the applied field increases with larger melt zones. For a melt of 14 mm in diameter and an aspect ratio of I it is in the range of 2.5-3.75 mT/50 Hz (corresponding to a Taylor number of Ta = 9.3 x 10(3) -2.1 x 10(-4)). The change from a time-dependent 3D-flow without field to a quasi-axisymmetric 2D-flow with the magnetic field is corroborated by numerical simulations of the flow field: the thermocapillary driven irregular flow rolls are transformed to a nearly axisymmetric flow with high azimuthal flow velocities but reduced axial and radial components. (C) 2001 Elsevier Science B.V. All rights reserved.
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页码:95 / 106
页数:12
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