Polymer dielectric evolution an support of the TFT-LCD industry

被引:0
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作者
Chuang, Eugene
Chen, Brian
So, Ying-Hung
Kisting, Scott
Mills, Michael
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Polymer dielectric materials were an enabling and indispensable material in the realization of the first high aperture (HA) Thin Film Transistor - Liquid Crystal Displays (TFT-LCDs). The inherent optical transparency of divinylsiloxane - bisbenzocyclobutene (DVS-bisBCB) polymer dielectric materials throughout the entire visible wavelength spectrum (400nm - 800nm) coupled with an excellent degree of planarization and high thermal stability (> 300 degrees C) were the key initial drivers for the insertion into the early TFT-LCD designs. The formulation and processing optimization for this polymer dielectric material were quickly developed to achieve significant planarization of the TFT structure. Continuous emphasis on manufacturing cost reduction was achieved by sequential development of photo-definability (solvent based and, subsequently, aqueous based) as well self-priming and curability in air.
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页码:406 / 408
页数:3
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