Preparation and characterization of microcrack-free thick YBa2CU3O7-δ films

被引:4
|
作者
Xiong Jie [1 ]
Qin Wenfeng [1 ]
Tang Jinlong [1 ]
Tao Bowan [1 ]
Cui Xumei [1 ]
Li Yanrong [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
关键词
YBCO superconducting film; microcrack-free thick film; critical current density; direct-current sputtering method;
D O I
10.1016/S1001-0521(07)60236-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
High quality epitaxial YBa2Cu3O7-delta (YBCO) superconducting films were fabricated on (00l) LaAlO3 substrates using the direct-current sputtering method. The attainment of an unusually high film thickness (up to 2.0 mu m) without microcracking was attributed in part to the presence of pores correlated with yttrium-rich composition in the films. The influence of the film thickness on the microstructure was investigated by X-ray diffraction conventional scan (theta-2 theta, omega-scan, pole figure) and high-resolution reciprocal space mapping. The films were c-axis oriented with no a-axis-oriented grains up to the thickness of 2 mu m. The surface morphology and the critical current density (J(c)) strongly depended on the film thickness. Furthermore, the reasons for these thickness dependences were elucidated in detail.
引用
收藏
页码:403 / 407
页数:5
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