Pulsed Growth of Vertically Aligned Nanotube Arrays with Variable Density

被引:34
|
作者
Jackson, Jeremy J. [1 ]
Puretzky, Alex A. [1 ]
More, Karren L. [2 ]
Rouleau, Christopher M. [1 ]
Eres, Gyula [2 ]
Geohegan, David B. [1 ]
机构
[1] Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN 37831 USA
[2] Oak Ridge Natl Lab, Mat Sci & Technol Div, Oak Ridge, TN 37831 USA
关键词
carbon nanotube array; density; Z-STEM; pulsed CVD; in situ diagnostics; optical reflectivity; CHEMICAL-VAPOR-DEPOSITION; WALLED CARBON NANOTUBES; FILMS; KINETICS; MASS; MORPHOLOGY; MECHANISM; CARPETS; SILICON;
D O I
10.1021/nn102029y
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The density of vertically aligned carbon nanotube arrays is shown to vary significantly during normal growth by chemical vapor deposition and respond rapidly to changes in feedstock flux. Pulsing the feedstock gas to repeatedly stop and start nanotube growth is shown to induce density variations up to a factor of 1.6 within ca. 1-2 mu m long layers, allowing the synthesis of new array architectures with distinct regions of controllable length and density variation. Z-Contrast scanning transmission electron microscopy of corresponding sections of the arrays is used to provide unambiguous measurements of these density variations. Time-resolved optical reflectivity measurements of the height and optical extinction coefficient of the growing arrays are shown to provide a real-time diagnostic of both array density and growth kinetics.
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页码:7573 / 7581
页数:9
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