Strategies of modelling and simulation of microsystems with electromechanical energy conversion

被引：3
|
作者：
Gerlach, G [1 ]
Klein, A [1 ]
机构：
[1] Dresden Univ Technol, Inst Solid State Elect, D-01062 Dresden, Germany
来源：
MICROELECTRONICS JOURNAL | 1998年 / 29卷 / 11期
关键词：
D O I：
10.1016/S0026-2692(97)00091-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
It is evident from the recent development of microsystem technology that usual simulation methods and tools can hardly meet the requirements of a modern design process. Although in most cases single subsystems can be described and simulated, their interactions cannot yet be included in the simulation process. This can be attributed to: (i) the coupling of different physical domains due to energy conversion; (ii) the complexity and heterogeneity of microsystems; and (iii) the use of extremely different design methods and tools for separate electric and non-electric subcomponents of microsystems. This paper describes and discusses several strategies of modelling and simulation of such complex and heterogeneous microsystems, which allow a coupled simulation of such systems with a reasonable accuracy of the computational results. The strategies are based exclusively on commercial simulation software. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：773 / 783
页数：11
相关论文
共 50 条
  • [21] Comments on Theory of Electromechanical Conversion of Energy.
    Przyborowski, Wlodzimierz
    Rozprawy Elektrotechniczne, 1986, 32 (01): : 69 - 79
  • [22] MEISEL,J - PRINCIPLES OF ELECTROMECHANICAL ENERGY CONVERSION
    SUBBAYYA.R
    HIGGINS, TJ
    IEEE TRANSACTIONS ON POWER APPARATUS AND SYSTEMS, 1966, PA85 (10): : A2 - &
  • [23] Electro-thermal simulation of microsystems with mixed abstraction modelling
    Jakovljevic, M
    Fotiu, PA
    Mrcarica, Z
    Litovski, V
    Detter, H
    MICROELECTRONICS RELIABILITY, 2001, 41 (06) : 823 - 835
  • [24] Effects of semiconduction on electromechanical energy conversion in piezoelectrics
    Li, Peng
    Jin, Feng
    Yang, Jiashi
    SMART MATERIALS AND STRUCTURES, 2015, 24 (02)
  • [25] Modeling and simulation of electromechanical transducers in microsystems using an analog hardware description language.
    Romanowicz, B
    Laudon, M
    Lerch, P
    Renaud, P
    Amann, HP
    Boegli, A
    Moser, V
    Pellandini, F
    EUROPEAN DESIGN & TEST CONFERENCE - ED&TC 97, PROCEEDINGS, 1997, : 119 - 123
  • [26] Modelling, simulation and design sigma-delta converters in silicon microsystems
    Szermer, M
    Daniel, M
    Slusarczyk, K
    Napieralski, A
    MODERN PROBLEMS OF RADIO ENGINEERING, TELECOMMUNICATIONS AND COMPUTER SCIENCE, PROCEEDINGS, 2002, : 342 - 344
  • [27] Experimental dynamics of electromechanical pulse energy conversion systems
    Kolokolov, YV
    Koschinsky, SL
    Bagrov, VV
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2006, 55 (01) : 35 - 43
  • [28] Experimental dynamics of electromechanical pulse energy conversion systems
    Kolokolov, YV
    Koschinsky, SL
    Bagrov, VV
    IDAACS'2003: PROCEEDINGS OF THE SECOND IEEE INTERNATIONAL WORKSHOP ON INTELLIGENT DATA ACQUISITION AND ADVANCED COMPUTING SYSTEMS: TECHNOLOGY AND APPLICATIONS, 2003, : 300 - 304
  • [29] A superconducting wireless energiser based on electromechanical energy conversion
    Zhang, Hongye
    Yang, Tianhui
    Grilli, Francesco
    Li, Wenxin
    Tuohy, Paul M.
    Xin, Ying
    SUPERCONDUCTIVITY, 2023, 7
  • [30] GENERALIZED EQUATIONS FOR ELECTROMECHANICAL AND ELECTRODYNAMIC ENERGY CONVERSION.
    Turowski, Janusz
    Rozprawy Elektrotechniczne, 1980, 26 (04): : 911 - 927
12345