Strategies of modelling and simulation of microsystems with electromechanical energy conversion

被引：3
|
作者：
Gerlach, G [1 ]
Klein, A [1 ]
机构：
[1] Dresden Univ Technol, Inst Solid State Elect, D-01062 Dresden, Germany
来源：
MICROELECTRONICS JOURNAL | 1998年 / 29卷 / 11期
关键词：
D O I：
10.1016/S0026-2692(97)00091-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
It is evident from the recent development of microsystem technology that usual simulation methods and tools can hardly meet the requirements of a modern design process. Although in most cases single subsystems can be described and simulated, their interactions cannot yet be included in the simulation process. This can be attributed to: (i) the coupling of different physical domains due to energy conversion; (ii) the complexity and heterogeneity of microsystems; and (iii) the use of extremely different design methods and tools for separate electric and non-electric subcomponents of microsystems. This paper describes and discusses several strategies of modelling and simulation of such complex and heterogeneous microsystems, which allow a coupled simulation of such systems with a reasonable accuracy of the computational results. The strategies are based exclusively on commercial simulation software. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：773 / 783
页数：11
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