DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION

被引：0
|
作者：
Liang, Boshen [1 ,2 ]
Paquet, Louis [1 ]
Jeong, Yongbin [1 ,2 ]
Heremans, Paul [1 ,2 ]
Cheyns, David [1 ]
机构：
[1] IMEC, Leuven, Belgium
[2] Katholieke Univ Leuven, Leuven, Belgium
来源：
2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2021年
关键词：
Micropump; Nozzle/Diffuser; Lab-on-Chip; Vorticity; Optimization; ELEMENTS;
D O I：
10.1109/NEMS51815.2021.9451478
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this study, a 3D acoustic-solid interaction model is combined with a time-dependent vorticity enhancement method for design optimization of nozzle/diffuser micropumps. Compared with the conventional method where static pressure loss ratio is used as the performance indicator of individual nozzle/diffuser element, the vortex method provides a direct and good prediction of output characteristics of the micropumps. An integrated piezoelectric micropump prototype is fabricated with flat-panel display compatible processing techniques. The frequency characterization shows good agreement of the micropump working frequency with that predicted by finite element simulation where additional damping effects are considered. A high-speed particle image velocimetry shows successfully the movement of fluid elements driven by the piezoelectric actuator.
引用
收藏
页码：1423 / 1426
页数：4
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