Anodically bonded silicon-glass optical chip for bio-chemical sensing applications

被引：0
|
作者：
De Stefano, L [1 ]
Malecki, K [1 ]
Moretti, L [1 ]
Rendina, I [1 ]
机构：
[1] Italian Natl Council Res, CNR, Dept Napoli, IMM, I-80131 Naples, Italy
来源：
MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS III | 2005年 / 5718卷
关键词：
D O I：
10.1117/12.591696
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
In this communication, the compatibility of porous silicon and anodic bonding technologies for the realization of sensing microcomponents in lab-on-chip applications has been demonstrated. The two techniques have been combined for the fabrication of a microsensor with biological and chemical molecules sensing capability, in view of its miniaturization and integration with smart micro-dosage systems.
引用
收藏
页码：38 / 47
页数：10
相关论文
共 50 条
  • [1] Reliability of anodically bonded silicon-glass packages
    Chen, MX
    Yi, XJ
    Gan, ZY
    Liu, S
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2005, 120 (01) : 291 - 295
  • [2] A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers
    R. Knechtel
    M. Knaup
    J. Bagdahn
    [J]. Microsystem Technologies, 2006, 12 : 462 - 467
  • [3] A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers
    Knechtel, R
    Knaup, M
    Bagdahn, J
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (05): : 462 - 467
  • [4] Chemical analysis of bonded and debonded silicon-glass interfaces
    Visser, MM
    Plaza, JA
    Wang, DT
    Hanneborg, AB
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2001, 11 (05) : N1 - N6
  • [5] Silicon Nanowire based platform device for Chemical/Bio-chemical sensing applications
    Singhal, Navin
    Santosh, M.
    Prajesh, Rahul
    Bose, S. C.
    Agarwal, Ajay
    [J]. 2018 IEEE SENSORS, 2018, : 1464 - 1467
  • [6] Porous silicon microcavities in bio-chemical sensing
    De Stefano, L
    Moretti, L
    Arcari, P
    Lamberti, A
    Rossi, AM
    Rendina, I
    [J]. SENSORS FOR ENVIRONMENTAL CONTROL, 2003, : 46 - 50
  • [7] Monolithic Silicon Optocouplers for Bio-Chemical Sensing
    Misiakos, Kostantinos
    [J]. EUROSENSORS XXV, 2011, 25
  • [8] Reducing thermal mismatch stress in anodically bonded silicon-glass wafers: theoretical estimation
    Sinev, Leonid S.
    Ryabov, Vladimir T.
    [J]. JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2017, 16 (01):
  • [9] Chalcogenide glass fibers: Optical window tailoring and suitability for bio-chemical sensing
    Lucas, Pierre
    Coleman, Garrett J.
    Jiang, Shibin
    Luo, Tao
    Yang, Zhiyong
    [J]. OPTICAL MATERIALS, 2015, 47 : 530 - 536
  • [10] Integrated silicon-glass opto-chemical sensor for lab-on-chip applications
    De Stefano, L
    Malecki, K
    Moretti, L
    Della Corte, F
    Rendina, I
    [J]. 2004 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2004, : 354 - 355
12345