In2O3 thin films based gas-sensors for NO2 and O3 detection

被引：0

作者：

Capone, S ^{[1
]}

Epifani, M ^{[1
]}

Faglia, G ^{[1
]}

Nelli, P ^{[1
]}

Rella, R ^{[1
]}

Sberveglieri, G ^{[1
]}

Siciliano, P ^{[1
]}

机构：

[1] CNR, IMM, Sez Lecce, I-73100 Lecce, Italy

来源：

Sensors for Environmental Control | 2003年

关键词：

D O I：

暂无

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

In2O3 thin films were prepared by the sol-gel process, by using an indium oxide sol obtained through a chemical complexation modified process. XRD measurements performed on the film deposited onto glass substrates show that the crystallization of the oxide takes place after heating at 300 degrees C in air and that the films prepared in this way have a smaller grain size than the films prepared with the traditional process. The gas sensing properties of the samples towards CO, NO2 and O-3 were also analysed. The In2O3 thin films showed high response to NO2 and O-3 and no cross sensitivity with CO.

引用

页码：40 / 45

页数：6

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