Diamond/β-SiC Composite Thin Films: Preparation, Properties and Applications

被引：7
|
作者：
Jiang, Xin [1 ]
Zhuang, Hao [1 ]
机构：
[1] Univ Siegen, Dept Mech Engn, Inst Mat Engn, D-57076 Siegen, Germany
来源：
NOVEL ASPECTS OF DIAMOND: FROM GROWTH TO APPLICATIONS | 2015年 / 121卷
关键词：
CHEMICAL-VAPOR-DEPOSITION; NANOCRYSTALLINE DIAMOND; AMORPHOUS-CARBON; GROWTH; SILICON; NUCLEATION; ENERGY; DNA; BIOCOMPATIBILITY; WETTABILITY;
D O I：
10.1007/978-3-319-09834-0_2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Diamond/beta-SiC composite films have been fabricated using chemical vapor deposition techniques. The ultimate goal is to create a superior material with combined advantages of both diamond and beta-SiC for a wide range of applications, such as tribological and biological coatings, sensors, windows for harsh environment, and electronic devices etc. In this chapter, the recent processes made in the synthesis, characterization and applications of the diamond/beta-SiC composite films are reviewed.
引用
收藏
页码：31 / 52
页数：22
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