DIELECTRIC PROPERTIES AND APPLICATIONS OF NANOCRYSTALLINE DIAMOND THIN FILMS

Nanocrystalline diamond (NCD) thin films, a recent process technology development, possess smooth surfaces making them attractive for high technology applications. However, little is known about the high temperature electrical properties of NCD films. Room temperature and high temperature dielectric properties of nanocrystalline and microcrystalline diamond thin films are presented. In particular, it will be demonstrated that it is possible to synthesize NCD films whose dielectric properties exceed that of standard dielectric materials at temperatures above 300 degrees C. Based on this research, we have developed novel process conditions which enable NCD deposition directly on top of devices for use as a heat conducting dielectric material. Also, recent development of multilayered diamond films with tailored morphology and structure will be presented. The implications of this research for developing devices for advanced technology applications will be presented. Our research shows that NCD is a versatile dielectric material and that it is possible to synthesize smooth, high electrical quality NCD films for high technology applications such as energy storage, power electronics, microelectromechanical systems, and chemical and biological sensor applications.