Estimation of AFM Tip Shape and Status in Linewidth and Profile Measurement

被引：0
|
作者：
Han, Guoqiang [1 ]
Jiang, Zhuangde [1 ]
Jing, Weixuan [1 ]
机构：
[1] State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
来源：
INEC: 2010 3RD INTERNATIONAL NANOELECTRONICS CONFERENCE, VOLS 1 AND 2 | 2010年
关键词：
METROLOGY;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A geometric model-based approach is presented to estimate tip shape and status by scanned AFM images and scanned SEM images of AFM tip in linewidth and profile measurement. The interaction between AFM tip and the sample is revealed as tip moves on the sample. The slope angle between the symmetry axis of the tip and the perpendicular to the surface of the investigated sample is characterized as a key parameter of AFM tip status. The method extends the existing characterization methods of AFM tip.
引用
收藏
页码：150 / 151
页数：2
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