Characterization of nanostructured ZnO thin films deposited through vacuum evaporation

被引:15
|
作者
Alberto Alvarado, Jose [1 ]
Maldonado, Arturo [2 ]
Juarez, Hector [3 ]
Pacio, Mauricio [3 ]
Perez, Rene [3 ]
机构
[1] Inst Politecn Nacl, Ctr Invest & Estudios Avanzados, Programa Nanociencias & Nanotecnol, Mexico City 07360, DF, Mexico
[2] Inst Politecn Nacl, Ctr Invest & Estudios Avanzados, Secc Elect Estado Solido, Mexico City 07360, DF, Mexico
[3] Benemerita Univ Autonoma Puebla, Ctr Invest Disposit Semicond, Puebla 72570, Mexico
来源
关键词
nanostructure; thin film; transmittance; vacuum evaporation; X-ray diffraction (XRD); OPTICAL-PROPERTIES; ULTRAVIOLET EMISSION; BEAM EVAPORATION; NANOWIRES; GAN;
D O I
10.3762/bjnano.6.100
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This work presents a novel technique to deposit ZnO thin films through a metal vacuum evaporation technique using colloidal nanoparticles (average size of 30 nm), which were synthesized by our research group, as source. These thin films had a thickness between 45 and 123 nm as measured by profilometry. XRD patterns of the deposited thin films were obtained. According to the HRSEM micrographs worm-shaped nanostructures are observed in samples annealed at 600 degrees C and this characteristic disappears as the annealing temperature increases. The films obtained were annealed from 25 to 1000 degrees C, showing a gradual increase in transmittance spectra up to 85%. The optical band gaps obtained for these films are about 3.22 eV. The PL measurement shows an emission in the red and in the violet region and there is a correlation with the annealing process.
引用
收藏
页码:971 / 975
页数:5
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