Piezoelectric MEMS generator based on the bulk PZT/silicon wafer bonding technique

被引：9
|
作者：
Tang, Gang [1 ,2 ]
Liu, Jing-quan [1 ]
Liu, He-sheng [1 ]
Li, Yi-gui [1 ]
Yang, Chun-sheng [1 ]
He, Dan-nong [3 ]
DzungDao, Viet [4 ]
Tanaka, Katsuhiko [4 ]
Sugiyama, Susumu [4 ]
机构：
[1] Shanghai Jiao Tong Univ, Natl Key Lab Nano Micro Fabricat Technol, Key Lab Thin Film & Microfabricat, Minist Educ, Shanghai 200240, Peoples R China
[2] Nanchang Inst Technol, Dept Mech & Engn, Nanchang 330099, Peoples R China
[3] Natl Engn Res Ctr Nanotechnol, Shanghai 200241, Peoples R China
[4] Ritsumeikan Univ, Dept Micro Syst Technol, Kusatsu, Shiga, Japan
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2011年 / 208卷 / 12期
基金：
中国国家自然科学基金;
关键词：
piezoelectric generators; PZT thick films; wafer bonding; POWER GENERATOR; FABRICATION; DEVICE;
D O I：
10.1002/pssa.201127186
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A MEMS-based piezoelectric energy harvester was fabricated by bonding a piezoelectric ceramic Pb (Zr,Ti)O3 (PZT) plate to silicon wafer. The generator structure of a trapezoidal shape composite cantilever beam with nickel metal mass was designed. The novel fabrication techniques to obtain PZT thick film with excellent piezoelectric properties, including a low-temperature PZTSi bonding using epoxy resin as the intermediate adhesive layer and thinning of the bulk PZT ceramics by mechanical lapping and polishing method, were carried out. A piezoelectric MEMS power generator array was successfully fabricated and the measurement results for a microgenerator with typical dimension were also presented. The test result shows that this novel technique has great potential to fabricate high-performance piezoelectric MEMS energy harvester.
引用
收藏
页码：2913 / 2919
页数：7
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