Piezoelectric MEMS generator based on the bulk PZT/silicon wafer bonding technique

被引：9

作者：

Tang, Gang ^{[1
,2
]}

Liu, Jing-quan ^{[1
]}

Liu, He-sheng ^{[1
]}

Li, Yi-gui ^{[1
]}

Yang, Chun-sheng ^{[1
]}

He, Dan-nong ^{[3
]}

DzungDao, Viet ^{[4
]}

Tanaka, Katsuhiko ^{[4
]}

Sugiyama, Susumu ^{[4
]}

机构：

[1] Shanghai Jiao Tong Univ, Natl Key Lab Nano Micro Fabricat Technol, Key Lab Thin Film & Microfabricat, Minist Educ, Shanghai 200240, Peoples R China

[2] Nanchang Inst Technol, Dept Mech & Engn, Nanchang 330099, Peoples R China

[3] Natl Engn Res Ctr Nanotechnol, Shanghai 200241, Peoples R China

[4] Ritsumeikan Univ, Dept Micro Syst Technol, Kusatsu, Shiga, Japan

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2011年 / 208卷 / 12期

基金：

中国国家自然科学基金;

关键词：

piezoelectric generators; PZT thick films; wafer bonding; POWER GENERATOR; FABRICATION; DEVICE;

D O I：

10.1002/pssa.201127186

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A MEMS-based piezoelectric energy harvester was fabricated by bonding a piezoelectric ceramic Pb (Zr,Ti)O3 (PZT) plate to silicon wafer. The generator structure of a trapezoidal shape composite cantilever beam with nickel metal mass was designed. The novel fabrication techniques to obtain PZT thick film with excellent piezoelectric properties, including a low-temperature PZTSi bonding using epoxy resin as the intermediate adhesive layer and thinning of the bulk PZT ceramics by mechanical lapping and polishing method, were carried out. A piezoelectric MEMS power generator array was successfully fabricated and the measurement results for a microgenerator with typical dimension were also presented. The test result shows that this novel technique has great potential to fabricate high-performance piezoelectric MEMS energy harvester.

引用

页码：2913 / 2919

页数：7

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