[1] Xi An Jiao Tong Univ, Micro Nanotechnol Res Ctr, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China
[2] Xi An Jiao Tong Univ, Frontier Inst Sci & Technol, Xian 710049, Shaanxi, Peoples R China
[3] Xi An Jiao Tong Univ, Sch Life Sci & Technol, Key Lab Biomed Informat Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China
[4] Xian Inst Electromech Informat Technol, Xian 710065, Shaanxi, Peoples R China
[5] Univ Illinois, Dept Mat Sci & Engn, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
[6] Univ Illinois, Beckman Inst, Urbana, IL 61801 USA